JPH0628662Y2 - 振動形差圧センサ - Google Patents
振動形差圧センサInfo
- Publication number
- JPH0628662Y2 JPH0628662Y2 JP6760688U JP6760688U JPH0628662Y2 JP H0628662 Y2 JPH0628662 Y2 JP H0628662Y2 JP 6760688 U JP6760688 U JP 6760688U JP 6760688 U JP6760688 U JP 6760688U JP H0628662 Y2 JPH0628662 Y2 JP H0628662Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- silicon
- strain gauge
- vibrator
- silicon diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 91
- 229910052710 silicon Inorganic materials 0.000 claims description 91
- 239000010703 silicon Substances 0.000 claims description 91
- 239000000758 substrate Substances 0.000 claims description 38
- 239000012530 fluid Substances 0.000 claims description 20
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241000269820 Euthynnus affinis Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6760688U JPH0628662Y2 (ja) | 1988-05-23 | 1988-05-23 | 振動形差圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6760688U JPH0628662Y2 (ja) | 1988-05-23 | 1988-05-23 | 振動形差圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01171337U JPH01171337U (en]) | 1989-12-05 |
| JPH0628662Y2 true JPH0628662Y2 (ja) | 1994-08-03 |
Family
ID=31292973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6760688U Expired - Lifetime JPH0628662Y2 (ja) | 1988-05-23 | 1988-05-23 | 振動形差圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628662Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013044675A (ja) | 2011-08-25 | 2013-03-04 | Yokogawa Electric Corp | 振動式差圧センサとその製造方法 |
| JP5880499B2 (ja) | 2013-08-19 | 2016-03-09 | 横河電機株式会社 | 振動式圧力センサ及びその製造方法 |
-
1988
- 1988-05-23 JP JP6760688U patent/JPH0628662Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01171337U (en]) | 1989-12-05 |
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